IEEE Transactions on Semiconductor Manufacturing
IEEE Transactions on Semiconductor Manufacturing > 2014 > 27 > 3 > 341 - 346
IEEE Transactions on Semiconductor Manufacturing > 2014 > 27 > 3 > 377 - 387
IEEE Transactions on Semiconductor Manufacturing > 2014 > 27 > 3 > 400 - 409
IEEE Transactions on Semiconductor Manufacturing > 2014 > 27 > 3 > 327 - 334
IEEE Transactions on Semiconductor Manufacturing > 2014 > 27 > 3 > 422 - 425
IEEE Transactions on Semiconductor Manufacturing > 2014 > 27 > 3 > 426 - 430
IEEE Transactions on Semiconductor Manufacturing > 2014 > 27 > 3 > 443 - 451
IEEE Transactions on Semiconductor Manufacturing > 2014 > 27 > 3 > 410 - 416
IEEE Transactions on Semiconductor Manufacturing > 2014 > 27 > 3 > 347 - 356
IEEE Transactions on Semiconductor Manufacturing > 2014 > 27 > 3 > 431 - 442
IEEE Transactions on Semiconductor Manufacturing > 2014 > 27 > 3 > 316 - 326
IEEE Transactions on Semiconductor Manufacturing > 2014 > 27 > 3 > 313 - 315
IEEE Transactions on Semiconductor Manufacturing > 2014 > 27 > 3 > 357 - 363
IEEE Transactions on Semiconductor Manufacturing > 2014 > 27 > 3 > 417 - 421
IEEE Transactions on Semiconductor Manufacturing > 2014 > 27 > 3 > 364 - 369
IEEE Transactions on Semiconductor Manufacturing > 2014 > 27 > 3 > 370 - 376